MEMORY WORDLINE HARD MASK EXTENSION

Details for Australian Patent Application No. 2003217233 (hide)

Owner ADVANCED MICRO DEVICES, INC. FUJITSU LIMITED

Inventors KAMAL, Tazrien; RAMSBEY, Mark, T.; HUI, Angela, T.; SHIRAIWA, Hidehiko; LINGUNIS, Emmanuil; YANG, Jean, Y.; SHIELDS, Jeffrey, A.; NGO, Minh, Van

Pub. Number AU-A-2003217233

PCT Number PCT/US03/01851

PCT Pub. Number WO2003/083916

Priority 10/109,516 27.03.02 US

Filing date 21 January 2003

Wipo publication date 13 October 2003

International Classifications

H01L 021/8246 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/3213 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/033 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 10/109,516 27.03.02 US

20 November 2003 Application Open to Public Inspection

  Published as AU-A-2003217233

16 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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