METHOD FOR THE DEPOSITION OF TRANSPARENT CONDUCTING LAYERS BY MEANS OF SPUTTER GAS COMPRISING HELIUM

Details for Australian Patent Application No. 2003216906 (hide)

Owner FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E. V.

Inventors EGEL, Manuela; GOEDICKE, Klaus; WINKLER, Torsten

Pub. Number AU-A-2003216906

PCT Number PCT/EP03/03346

PCT Pub. Number WO2003/104518

Priority 102 24 990.3 05.06.02 DE

Filing date 31 March 2003

Wipo publication date 22 December 2003

International Classifications

C23C 014/08 Coating by vacuum evaporation, by sputtering or by ion implantation - Oxides

C23C 014/35 Coating by vacuum evaporation, by sputtering or by ion implantation - by application of a magnetic field, e.g. magnetron sputtering

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 102 24 990.3 05.06.02 DE

19 February 2004 Application Open to Public Inspection

  Published as AU-A-2003216906

24 February 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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