METHOD AND APPARATUS FOR ION BEAM COATING

Details for Australian Patent Application No. 2003216550 (hide)

Owner UNIVERSITY OF WASHINGTON

Inventors LEE, Hak-No; KITCHING, Kathryn, J.; RATNER, Buddy, D.; TURECEK, Frank; ELAM, William, T.

Pub. Number AU-A-2003216550

PCT Number PCT/US03/07218

PCT Pub. Number WO2003/070998

Priority 10/081,990 20.02.02 US

Filing date 20 February 2003

Wipo publication date 9 September 2003

International Classifications

C23C 014/02 Coating by vacuum evaporation, by sputtering or by ion implantation - Pretreatment of the material to be coated

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

B05D 007/24 Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials - for applying particular liquids or other fluent materials

C23C 014/22 Coating by vacuum evaporation, by sputtering or by ion implantation - characterised by the process of coating

C23C 014/12 Coating by vacuum evaporation, by sputtering or by ion implantation - Organic material

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 10/081,990 20.02.02 US

9 October 2003 Application Open to Public Inspection

  Published as AU-A-2003216550

4 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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