METHOD FOR THE PRODUCTION OF A BRAGG LATTICE IN A SEMICONDUCTOR LAYER SEQUENCE BY ETCHING AND SEMICONDUCTOR ELEMENT

Details for Australian Patent Application No. 2003215496 (hide)

Owner FORSCHUNGSVERBUND BERLIN E.V.

Inventors WENZEL, Hans; BRAUN, Matthias; ERBERT, Gotz

Pub. Number AU-A-2003215496

PCT Number PCT/DE03/00072

PCT Pub. Number WO2003/058685

Priority 102 00 360.2 08.01.02 DE

Filing date 8 January 2003

Wipo publication date 24 July 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 102 00 360.2 08.01.02 DE

4 September 2003 Application Open to Public Inspection

  Published as AU-A-2003215496

23 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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