MEMS DEVICES AND METHODS OF MANUFACTURE

Details for Australian Patent Application No. 2003215222 (hide)

International Classifications

Event Publications

31 July 2003 Complete Application Filed

Priority application(s): 10/079,985 21.02.02 US; 60/418,853 16.10.02 US; 10/309,951 04.12.02 US; 10/309,964 04.12.02 US

16 October 2003 Application Open to Public Inspection

Published as AU-A-2003215222

4 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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