CHARACTERIZATION AND COMPENSATION OF NON-CYCLIC ERRORS IN INTERFEROMETRY SYSTEMS

Details for Australian Patent Application No. 2003215204 (hide)

Owner ZYGO CORPORATION

Inventors HILL, Henry, A.

Pub. Number AU-A-2003215204

PCT Number PCT/US03/04318

PCT Pub. Number WO2003/069264

Priority 60/356,397 12.02.02 US; 60/372,221 12.04.02 US; 60/356,271 12.02.02 US

Filing date 12 February 2003

Wipo publication date 4 September 2003

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 60/356,397 12.02.02 US; 60/372,221 12.04.02 US; 60/356,271 12.02.02 US

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2003215204

28 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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