TIERED STRUCTURE HAVING A MULTI-LAYERED RESIST STACK

Details for Australian Patent Application No. 2003215061 (hide)

Owner MOTOROLA, INC.

Inventors GEHOSKI, Kathleen, Ann; POPOVICH, Laura; MANCINI, David, P.; RESNICK, Doug, J.

Pub. Number AU-A-2003215061

PCT Number PCT/US03/03498

PCT Pub. Number WO2003/073477

Priority 10/081,199 22.02.02 US

Filing date 4 February 2003

Wipo publication date 9 September 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 10/081,199 22.02.02 US

16 October 2003 Application Open to Public Inspection

  Published as AU-A-2003215061

11 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003215062-Secretion, transcription and sporulation genes in Bacillus clausii

2003215060-MONITORING OF CONTACT HOLE PRODUCTION