METHOD AND APPARATUS FOR REMING PHOTORESIST USING SPARGER

Details for Australian Patent Application No. 2003214854 (hide)

Owner AKRION, LLC

Inventors NOVAK, Richard; KASHKOUSH, Ismail

Pub. Number AU-A-2003214854

PCT Number PCT/US03/01588

PCT Pub. Number WO2003/063221

Priority 10/052,823 17.01.02 US

Filing date 16 January 2003

Wipo publication date 2 September 2003

International Classifications

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C03C 015/02 Surface treatment of glass

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 10/052,823 17.01.02 US

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2003214854

7 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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