A METHOD FOR DETECTING AND MONITORING WAFER PROBING PROCESS INSTABILITY

Details for Australian Patent Application No. 2003214771 (hide)

Owner SYSTEMS ON SILICON MANUFACTURING CO. PTE. LTD.

Inventors TAN, Beng, Ghee

Pub. Number AU-A-2003214771

PCT Number PCT/SG03/00022

PCT Pub. Number WO2004/070399

Filing date 5 February 2003

Wipo publication date 30 August 2004

International Classifications

G01R 001/067 Details of instruments or arrangements of the types included in groups and - Measuring probes

G01R 031/02 Arrangements for testing electric properties - Testing of electric apparatus, lines, or components for short-circuits, discontinuities, leakage, or incorrect line connection

Event Publications

31 July 2003 Complete Application Filed

30 September 2004 Application Open to Public Inspection

  Published as AU-A-2003214771

20 October 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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