MEMS DEVICES ON A NANOMETER SCALE

Details for Australian Patent Application No. 2003214406 (hide)

Owner BTG INTERNATIONAL LIMITED

Inventors MONTELIUS, Lars, G.; LING, Torbjorn, G., I.; LITWIN, Andrej

Pub. Number AU-A-2003214406

PCT Number PCT/GB03/01069

PCT Pub. Number WO2004/080886

Filing date 13 March 2003

Wipo publication date 30 September 2004

International Classifications

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

Event Publications

31 July 2003 Complete Application Filed

4 November 2004 Application Open to Public Inspection

  Published as AU-A-2003214406

1 December 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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