PEDESTAL FOR MOUNTING SEMICONDUCTOR FABRICATION EQUIPMENTS

Details for Australian Patent Application No. 2003214376 (hide)

Owner TRIKON TECHNOLOGIES LIMITED

Inventors TROWELL, Robert, Kenneth; GREEN, Gordon, Robert

Pub. Number AU-A-2003214376

PCT Number PCT/GB03/00861

PCT Pub. Number WO2003/075325

Priority 0204882.5 01.03.02 GB; 60/391,973 28.06.02 US

Filing date 27 February 2003

Wipo publication date 16 September 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

F16M 005/00 Engine beds, i.e. means for supporting engines or machines on foundations

B23Q 001/01 Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 0204882.5 01.03.02 GB; 60/391,973 28.06.02 US

23 October 2003 Application Open to Public Inspection

  Published as AU-A-2003214376

18 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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