Method for producing microsystems

Details for Australian Patent Application No. 2003214001 (hide)

Owner Microtec Gesellschaft Fur Mikrotechnologie MBH

Inventors Gotzen, Reiner

Agent Griffith Hack

Pub. Number AU-B-2003214001

PCT Number PCT/DE03/00419

PCT Pub. Number WO2004/070835

Priority 103 01 612.0 17.01.03 DE

Filing date 13 February 2003

Wipo publication date 30 August 2004

Acceptance publication date 2 August 2007

International Classifications

H01L 21/98 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/48 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 23/538 (2006.01) Details of semiconductor or other solid state devices

H01L 25/065 (2006.01) Assemblies consisting of a plurality of individual semiconductor or other solid state devices - the devices being of a type provided for in group

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 103 01 612.0 17.01.03 DE

30 September 2004 Application Open to Public Inspection

  Published as AU-B-2003214001

24 May 2007 Assignment before Grant

  Gotzen, Reiner The application has been assigned to Microtec Gesellschaft Fur Mikrotechnologie MBH

2 August 2007 Application Accepted

  Published as AU-B-2003214001

29 November 2007 Standard Patent Sealed

8 September 2011 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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