SHAPE MEASURING METHOD, INTERFERENCE MEASURING DEVICE, PORDUCTION METHOD FOR PROJECTION OPTICAL SYSTEM, AND PORJECTIONJ ALIGNER

Details for Australian Patent Application No. 2003213455 (hide)

Owner NIKON CORPORATION

Inventors NAKAYAMA, Shigeru

Pub. Number AU-A-2003213455

PCT Number PCT/JP03/02842

PCT Pub. Number WO2003/076872

Priority 2002-67224 12.03.02 JP

Filing date 11 March 2003

Wipo publication date 22 September 2003

International Classifications

G01B 011/24 Measuring arrangements characterised by the use of optical means - for measuring contours or curvatures

G01J 009/02 Measuring optical phase difference

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

G02B 027/18 Other optical systems - for optical projection, e.g. combination of mirror and condenser and objective

G01M 011/00 Testing of optical apparatus

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

24 July 2003 Complete Application Filed

  Priority application(s): 2002-67224 12.03.02 JP

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2003213455

2 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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