POROUS MATERIAL AND PROCESS FOR PRODUCING THE SAME

Details for Australian Patent Application No. 2003213353 (hide)

Owner CANON KABUSHIKI KAISHA

Inventors FUKUTANI, Kazuhiko; DEN, Tohru

Pub. Number AU-A-2003213353

PCT Number PCT/JP03/02999

PCT Pub. Number WO2003/078687

Priority 2002-73111 15.03.02 JP; 2002-363164 13.12.02 JP

Filing date 13 March 2003

Wipo publication date 29 September 2003

International Classifications

C23C 030/00 Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process

B82B 003/00 Manufacture or treatment of nano-structures

C01B 033/00 Silicon

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

Event Publications

24 July 2003 Complete Application Filed

  Priority application(s): 2002-73111 15.03.02 JP; 2002-363164 13.12.02 JP

6 November 2003 Application Open to Public Inspection

  Published as AU-A-2003213353

2 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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