APPARATUS WITH PROCESSING STATIONS FOR MANUALLY AND AUTOMATICALLY PROCESSING MICROELECTRONIC WORKPIECES

Details for Australian Patent Application No. 2003213148 (hide)

Owner SEMITOOL, INC.

Inventors HARRIS, Randy; WOODRUFF, Daniel, J.

Pub. Number AU-A-2003213148

PCT Number PCT/US03/05063

PCT Pub. Number WO2003/072853

Priority 10/080,910 22.02.02 US; 10/080,914 22.02.02 US; 10/080,915 22.02.02 US

Filing date 21 February 2003

Wipo publication date 9 September 2003

International Classifications

C25B 009/00 Cells or assemblies of cells

C25C 007/00 Constructional parts, or assemblies thereof, of cells

C25D 005/00 Electroplating characterised by the process

C25D 005/50 Electroplating characterised by the process

C25D 007/12 Electroplating characterised by the article coated - Semiconductors

C25D 011/32 Electrolytic coating by surface reaction, i.e. forming conversion layers

C25D 017/00 Constructional parts, or assemblies thereof, of cells for electrolytic coating

C25F 003/00 Electrolytic etching or polishing

Event Publications

24 July 2003 Complete Application Filed

  Priority application(s): 10/080,910 22.02.02 US; 10/080,914 22.02.02 US; 10/080,915 22.02.02 US

16 October 2003 Application Open to Public Inspection

  Published as AU-A-2003213148

23 October 2003 Application Open to Public Inspection

  Published as AU-A-2003213148

11 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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