REACTOR ASSEMBLY AND PROCESSING METHOD

Details for Australian Patent Application No. 2003213000 (hide)

Owner AXCELIS TECHNOLOGIES, INC.

Inventors KINNARD, David; FERRIS, David

Pub. Number AU-A-2003213000

PCT Number PCT/US03/03998

PCT Pub. Number WO2003/067635

Priority 10/071,908 08.02.02 US

Filing date 10 February 2003

Wipo publication date 2 September 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

24 July 2003 Complete Application Filed

  Priority application(s): 10/071,908 08.02.02 US

25 September 2003 Application Open to Public Inspection

  Published as AU-A-2003213000

28 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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