METHODS AND APPARATUS FOR ELECTROCHEMICAL-MECHANICAL PROCESSING OF MICROELECTRONIC WORKPIECES

Details for Australian Patent Application No. 2003212478 (hide)

Owner MICRON TECHNOLOGY, INC.

Inventors MOORE, Scott E.; LEE, Whonchee; MEIKLE, Scott G.; DOAN, Trung T.

Pub. Number AU-A-2003212478

PCT Number PCT/US03/06373

PCT Pub. Number WO2003/076134

Priority 10/090,869 04.03.02 US

Filing date 28 February 2003

Wipo publication date 22 September 2003

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24B 049/10 Measuring - involving electrical means

B23H 005/08 Combined machining

B23H 005/10 Combined machining

C25F 007/00 Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects

Event Publications

24 July 2003 Complete Application Filed

  Priority application(s): 10/090,869 04.03.02 US

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2003212478

18 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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