Method and resulting structure for manufacturing semiconductor substrate

Details for Australian Patent Application No. 2003212090 (hide)

Owner COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION

Inventors Cunningham, Shaun Joseph

Agent Pini Patent & Trade Mark Attorneys of Unit **** Highway Ringwood VIC 3134 Australia

Pub. Number AU-A-2003212090

PCT Number PCT/AU03/00298

PCT Pub. Number WO2003/077311

Priority PS 1122 14.03.02 AU

Filing date 13 March 2003

Wipo publication date 22 September 2003

International Classifications

H01L 021/78 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 023/14 Details of semiconductor or other solid state devices

Event Publications

24 July 2003 Complete Application Filed

  Priority application(s): PS 1122 14.03.02 AU

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2003212090

9 June 2005 Assignment before Grant

  Commonwealth Scientific and Industrial Research Organisation The application has been assigned to EpiTactix Pty Ltd

9 October 2008 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(d). Examination has been requested or an examination report has issued for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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