METHOD FOR PROCESSING SUBSTRATE

Details for Australian Patent Application No. 2003211806 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors MATSUYAMA, Seiji; SASAKI, Masaru; SUGAWARA, Takuya

Pub. Number AU-A-2003211806

PCT Number PCT/JP03/02272

PCT Pub. Number WO2003/073492

Priority 2002-51746 27.02.02 JP

Filing date 27 February 2003

Wipo publication date 9 September 2003

International Classifications

H01L 021/318 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 029/78 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

Event Publications

24 July 2003 Complete Application Filed

  Priority application(s): 2002-51746 27.02.02 JP

16 October 2003 Application Open to Public Inspection

  Published as AU-A-2003211806

11 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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