METHOD OF ETCHING AND ETCHING APPARATUS

Details for Australian Patent Application No. 2003211593 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors ADACHI, Kenji; KOBAYASHI, Noriyuki

Pub. Number AU-A-2003211593

PCT Number PCT/JP03/02870

PCT Pub. Number WO2003/077301

Priority 2002-66343 12.03.02 JP

Filing date 11 March 2003

Wipo publication date 22 September 2003

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

24 July 2003 Complete Application Filed

  Priority application(s): 2002-66343 12.03.02 JP

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2003211593

2 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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