ETCHING RESISTANT FILM, PROCESS FOR PRODUCING THE SAME, SURFACE CURED RESIST PATTERN, PROCESS FOR PRODUCING THE SAME, SEMICONDUCTOR DEVICE AND PROCESS FOR PRODUCING THE SAME

Details for Australian Patent Application No. 2003211349 (hide)

Owner FUJITSU LIMITED

Inventors NOZAKI, Koji; TAKEDA, Masayuki

Pub. Number AU-A-2003211349

PCT Number PCT/JP03/02324

PCT Pub. Number WO2004/077539

Filing date 28 February 2003

Wipo publication date 17 September 2004

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

24 July 2003 Complete Application Filed

21 October 2004 Application Open to Public Inspection

  Published as AU-A-2003211349

17 November 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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