APPARATUS AND METHOD FOR DEPOSITING LARGE AREA COATINGS ON PLANAR SURFACES

Details for Australian Patent Application No. 2003211169 (hide)

Owner GENERAL ELECTRIC COMPANY

Inventors SCHAEPKENS, Marc

Pub. Number AU-A-2003211169

PCT Number PCT/US03/05209

PCT Pub. Number WO2004/076716

Filing date 20 February 2003

Wipo publication date 17 September 2004

International Classifications

C23C 016/513 Chemical deposition or plating by decomposition

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

C23C 016/455 Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

Event Publications

17 July 2003 Complete Application Filed

21 October 2004 Application Open to Public Inspection

  Published as AU-A-2003211169

3 November 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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