LOW CONTAMINATION COMPONENTS FOR SEMICONDUCTOR PROCESSING APPARATUS AND METHODS FOR MAKING COMPONENTS

Details for Australian Patent Application No. 2003210966 (hide)

Owner LAM RESEARCH CORPORATION

Inventors O'DONNELL, Robert, J.

Pub. Number AU-A-2003210966

PCT Number PCT/US03/04061

PCT Pub. Number WO2003/080892

Priority 10/101,701 21.03.02 US

Filing date 12 February 2003

Wipo publication date 8 October 2003

International Classifications

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

C23C 004/10 Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge - Oxides, borides, carbides, nitrides, silicides or mixtures thereof

C23C 014/56 Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 10/101,701 21.03.02 US

13 November 2003 Application Open to Public Inspection

  Published as AU-A-2003210966

9 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003210967-ANALYSIS OF THIRD PARTY NETWORKS

2003210965-IN-LINE HYDRATION PACK BIOLOGICAL FILTER