CESIUM VAPOR EMITTER AND METHOD OF FABRICATING THE SAME

Details for Australian Patent Application No. 2003210716 (hide)

Owner PLASMION CORPORATION

Inventors SOHN, Minho; KIM, Seungdeok; KIM, Steven

Pub. Number AU-A-2003210716

PCT Number PCT/US03/02632

PCT Pub. Number WO2003/064721

Priority 10/058,340 30.01.02 US

Filing date 30 January 2003

Wipo publication date 2 September 2003

International Classifications

C23C 014/24 Coating by vacuum evaporation, by sputtering or by ion implantation - Vacuum evaporation

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

H01J 027/02 Ion beam tubes - Ion sources

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 10/058,340 30.01.02 US

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2003210716

14 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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