ALD APPARATUS AND METHOD

Details for Australian Patent Application No. 2003210562 (hide)

Owner SUNDEW TECHNOLOGIES, LLC

Inventors SNEH, Ofer

Pub. Number AU-A-2003210562

PCT Number PCT/US03/01548

PCT Pub. Number WO2003/062490

Priority 60/349,634 17.01.02 US

Filing date 17 January 2003

Wipo publication date 2 September 2003

International Classifications

C23C 016/455 Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

C23C 016/56 Chemical deposition or plating by decomposition - After-treatment

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

G05D 016/00 Control of fluid pressure

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 60/349,634 17.01.02 US

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2003210562

7 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003210563-METHODS FOR FETAL DNA DETECTION AND ALLELE QUANTITATION

2003210561-IMPROVED QUADRATURE HYBRID AND IMPROVED VECTOR MODULATOR IN A CHIP SCALE PACKAGE USING SAME