DEVICE FOR DEPOSITING THIN LAYERS WITH A WIRELESS DETECTION OF PROCESS PARAMETERS

Details for Australian Patent Application No. 2003210288 (hide)

Owner AIXTRON AG

Inventors BAUMANN, Peter; STRAUCH, Gerd; SCHUMACHER, Marcus; FRANKEN, Walter

Pub. Number AU-A-2003210288

PCT Number PCT/EP03/01550

PCT Pub. Number WO2003/071504

Priority 102 07 901.3 22.02.02 DE

Filing date 15 February 2003

Wipo publication date 9 September 2003

International Classifications

G08C 017/02 Arrangements for transmitting signals characterised by the use of a wireless electrical link

C23C 014/54 Coating by vacuum evaporation, by sputtering or by ion implantation - Controlling or regulating the coating process

C30B 025/16 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Controlling or regulating

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 102 07 901.3 22.02.02 DE

9 October 2003 Application Open to Public Inspection

  Published as AU-A-2003210288

11 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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