HEATING IN A VACUUM ATMOSPHERE IN THE PRESENCE OF A PLASMA

Details for Australian Patent Application No. 2003210278 (hide)

Owner N.V. BEKAERT S.A. ENERGY CONVERSION DEVICES, INC.

Inventors DENUL, Jurgen; PERSOONE, Bart; DE BOSSCHER, Wilmert; DOEHLER, Joachim; GOBIN, Guy

Pub. Number AU-A-2003210278

PCT Number PCT/EP03/01516

PCT Pub. Number WO2003/065766

Priority 02075507.0 30.01.02 EP

Filing date 29 January 2003

Wipo publication date 2 September 2003

International Classifications

H05B 007/00 Heating by electric discharge

C23C 016/48 Chemical deposition or plating by decomposition - by irradiation, e.g. photolysis, radiolysis, particle radiation

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H05B 003/00 Ohmic-resistance heating

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 02075507.0 30.01.02 EP

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2003210278

14 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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