POLARISATION-OPTIMISED ILLUMINATION SYSTEM

Details for Australian Patent Application No. 2003210213 (hide)

Owner CARL ZEISS SMT AG

Inventors SCHUSTER, Karl-Heinz

Pub. Number AU-A-2003210213

PCT Number PCT/EP03/01146

PCT Pub. Number WO2003/067334

Priority 102 06 061.4 08.02.02 DE

Filing date 5 February 2003

Wipo publication date 2 September 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 102 06 061.4 08.02.02 DE

25 September 2003 Application Open to Public Inspection

  Published as AU-A-2003210213

28 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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