DEVICE FOR MANIPULATION OF THE ANGULAR POSITION OF AN OBJECT RELATIVE TO A FIXED STRUCTURE

Details for Australian Patent Application No. 2003209739 (hide)

Owner CARL ZEISS SMT AG

Inventors WEBER, Ulrich; HOLDERER, Hubert; MUENKER, Hartmut

Pub. Number AU-A-2003209739

PCT Number PCT/EP03/02778

PCT Pub. Number WO2003/081337

Priority 102 12 547.3 21.03.02 DE

Filing date 18 March 2003

Wipo publication date 8 October 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 007/18 Mountings, adjusting means, or light-tight connections, for optical elements - for prisms

G02B 007/00 Mountings, adjusting means, or light-tight connections, for optical elements

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 102 12 547.3 21.03.02 DE

13 November 2003 Application Open to Public Inspection

  Published as AU-A-2003209739

9 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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