POLISHING APPARATUS AND METHOD FOR DETECTING FOREIGN MATTER ON POLISHING SURFACE

Details for Australian Patent Application No. 2003209718 (hide)

Owner EBARA CORPORATION

Inventors TOGAWA, Tetsuji; NABEYA, Osamu

Pub. Number AU-A-2003209718

PCT Number PCT/JP03/02233

PCT Pub. Number WO2003/072306

Priority NO. 2002-053112 28.02.02 JP

Filing date 27 February 2003

Wipo publication date 9 September 2003

International Classifications

B24B 049/12 Measuring - involving optical means

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): NO. 2002-053112 28.02.02 JP

16 October 2003 Application Open to Public Inspection

  Published as AU-A-2003209718

18 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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