GROUP III NITRIDE SEMICONDUCTOR CRYSTAL, PRODUCTION METHOD THEREOF AND GROUP III NITRIDE SEMICONDUCTOR EPITAXIAL WAFER

Details for Australian Patent Application No. 2003209712 (hide)

Owner SHOWA DENKO K.K.

Inventors MIKI, Hisayuki; SAKURAI, Tetsuo; OKUYAMA, Mineo

Pub. Number AU-A-2003209712

PCT Number PCT/JP03/01558

PCT Pub. Number WO2003/068699

Priority 2002-38841 15.02.02 JP; 60/367,719 28.03.02 US

Filing date 14 February 2003

Wipo publication date 4 September 2003

International Classifications

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 2002-38841 15.02.02 JP; 60/367,719 28.03.02 US

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2003209712

4 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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