SLURRY AND METHOD FOR CHEMICAL MECHANICAL POLISHING OF METAL STRUCTURES INCLUDING REFRACTORY METAL BASED BARRIER LAYERS
Details for Australian Patent Application No. 2003209429 (hide)
International Classifications
Event Publications
17 July 2003 Complete Application Filed
Priority application(s): 10/082,010 22.02.02 US
16 October 2003 Application Open to Public Inspection
Published as AU-A-2003209429
23 October 2003 Application Open to Public Inspection
Published as AU-A-2003209429
11 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired
This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.
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