SLURRY AND METHOD FOR CHEMICAL MECHANICAL POLISHING OF METAL STRUCTURES INCLUDING REFRACTORY METAL BASED BARRIER LAYERS

Details for Australian Patent Application No. 2003209429 (hide)

Owner UNIVERSITY OF FLORIDA

Inventors LEE, Seung-Mahn; SINGH, Rajiv, K.

Pub. Number AU-A-2003209429

PCT Number PCT/US03/02648

PCT Pub. Number WO2003/072683

Priority 10/082,010 22.02.02 US

Filing date 29 January 2003

Wipo publication date 9 September 2003

International Classifications

C09K 013/00 Etching, surface-brightening or pickling compositions

C09K 013/06 Etching, surface-brightening or pickling compositions

H01L 021/461 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 10/082,010 22.02.02 US

16 October 2003 Application Open to Public Inspection

  Published as AU-A-2003209429

23 October 2003 Application Open to Public Inspection

  Published as AU-A-2003209429

11 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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