STICTION ALLEVIATION USING PASSIVATION LAYER PATTERNING

Details for Australian Patent Application No. 2003209416 (hide)

Owner SUPERCONDUCTOR TECHNOLOGIES, INC.

Inventors PROPHET, Eric, M.

Pub. Number AU-A-2003209416

PCT Number PCT/US03/02578

PCT Pub. Number WO2003/067662

Priority 10/072,656 07.02.02 US

Filing date 29 January 2003

Wipo publication date 2 September 2003

International Classifications

H01L 027/108 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - Dynamic random access memory structures

G01D 015/00 Component parts of recorders for measuring arrangements not specially adapted for a specific variable

B41J 002/04 Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed - generating single droplets or particles on demand

B41J 002/06 Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed

H01L 029/82 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/8242 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 10/072,656 07.02.02 US

25 September 2003 Application Open to Public Inspection

  Published as AU-A-2003209416

21 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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