APERTURE MASKS FOR CIRCUIT FABRICATION

Details for Australian Patent Application No. 2003209328 (hide)

Owner 3M INNOVATIVE PROPERTIES COMPANY

Inventors FLEMING, Patrick, R.; HAASE, Michael, A.; KELLEY, Tommie, W.; MUYRES, Dawn, V.; THEISS, Steven; BAUDE, Paul, F.

Pub. Number AU-A-2003209328

PCT Number PCT/US03/01877

PCT Pub. Number WO2003/069015

Priority 10/076,174 14.02.02 US

Filing date 21 January 2003

Wipo publication date 4 September 2003

International Classifications

C23C 014/04 Coating by vacuum evaporation, by sputtering or by ion implantation - Coating on selected surface areas, e.g. using masks

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 10/076,174 14.02.02 US

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2003209328

28 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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