APERTURE MASKS FOR CIRCUIT FABRICATION

Details for Australian Patent Application No. 2003209312 (hide)

Owner 3M INNOVATIVE PROPERTIES COMPANY

Inventors BAUDE, Paul, F.; FLEMING, Patrick, R.; HAASE, Michael, A.; KELLEY, Tommie, W.; MUYRES, Dawn, V.; THEISS, Steven

Pub. Number AU-A-2003209312

PCT Number PCT/US03/01751

PCT Pub. Number WO2003/069014

Priority 10/076,003 14.02.02 US

Filing date 21 January 2003

Wipo publication date 4 September 2003

International Classifications

C23C 014/04 Coating by vacuum evaporation, by sputtering or by ion implantation - Coating on selected surface areas, e.g. using masks

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 10/076,003 14.02.02 US

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2003209312

28 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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