APPARATUS AND METHOD FOR IMPROVING MICROWAVE COUPLING TO A RESONANT CAVITY

Details for Australian Patent Application No. 2003209236 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors STRANG, Eric, J.

Pub. Number AU-A-2003209236

PCT Number PCT/US03/01073

PCT Pub. Number WO2003/065061

Priority 60/352,503 31.01.02 US

Filing date 31 January 2003

Wipo publication date 2 September 2003

International Classifications

G01R 027/04 Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom - in circuits having distributed constants

H01P 007/06 Resonators of the waveguide type

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 60/352,503 31.01.02 US

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2003209236

14 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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