METHOD AND APPARATUS FOR PROCESS MONITORING AND CONTROL

Details for Australian Patent Application No. 2003209148 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors LUDVIKSSON, Audunn

Pub. Number AU-A-2003209148

PCT Number PCT/US03/00047

PCT Pub. Number WO2003/065132

Priority 60/352,210 29.01.02 US

Filing date 28 January 2003

Wipo publication date 2 September 2003

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 60/352,210 29.01.02 US

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2003209148

14 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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