TRANSITION FLOW TREATMENT PROCESS AND APPARATUS

Details for Australian Patent Application No. 2003209078 (hide)

Owner FSI INTERNATIONAL, INC.

Inventors CHRISTENSON, Kurt, K.; LEE, Nam, Pyo; MICHALKO, Gary, W.; RATHMAN, Christina, A.

Pub. Number AU-A-2003209078

PCT Number PCT/US03/03831

PCT Pub. Number WO2003/085705

Priority 10/115,449 03.04.02 US

Filing date 7 February 2003

Wipo publication date 20 October 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B08B 003/10 Cleaning by methods involving the use or presence of liquid or steam - with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity, by vibration

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 10/115,449 03.04.02 US

27 November 2003 Application Open to Public Inspection

  Published as AU-A-2003209078

23 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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