A SUSCEPTOR PROVIDED WITH INDENTATIONS AND AN EPITAXIAL REACTOR WHICH USES THE SAME

Details for Australian Patent Application No. 2003208826 (hide)

Owner LPE SPA

Inventors PRETI, Franco

Pub. Number AU-A-2003208826

PCT Number PCT/EP03/01305

PCT Pub. Number WO2003/069029

Priority MI2002A000306 15.02.02 IT

Filing date 10 February 2003

Wipo publication date 4 September 2003

International Classifications

C30B 025/12 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Substrate holders or susceptors

C23C 016/46 Chemical deposition or plating by decomposition - characterised by the method used for heating the substrate

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): MI2002A000306 15.02.02 IT

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2003208826

4 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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