METHOD FOR PRODUCING A SENSOR OR ACTUATOR ARRANGEMENT, AND CORRESPONDING SENSOR OR ACTUATOR ARRANGEMENT

Details for Australian Patent Application No. 2003208812 (hide)

Owner MICRONAS GMBH

Inventors ROGALLA, Markus; FREUND, Ingo; LEHMANN, Mirko

Pub. Number AU-A-2003208812

PCT Number PCT/EP03/01222

PCT Pub. Number WO2003/068671

Priority 102 06 464.4 16.02.02 DE

Filing date 7 February 2003

Wipo publication date 4 September 2003

International Classifications

B81B 007/00 Micro-structural systems

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 102 06 464.4 16.02.02 DE

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2003208812

4 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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