INDIRECTLY HEATED BUTTON CATHODE FOR AN ION SOURCE

Details for Australian Patent Application No. 2003208427 (hide)

Owner APPLIED MATERIALS, INC.

Inventors SAKASE, Takao; SATOH, Shu; RYDING, Geoffrey; ROSE, Peter; CHRISTOU, Christos; FARLEY, Marvin

Pub. Number AU-A-2003208427

PCT Number PCT/GB03/00733

PCT Pub. Number WO2003/075305

Priority 10/091,351 06.03.02 US; 10/259,827 30.09.02 US

Filing date 20 February 2003

Wipo publication date 16 September 2003

International Classifications

H01J 037/00 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 10/091,351 06.03.02 US; 10/259,827 30.09.02 US

23 October 2003 Application Open to Public Inspection

  Published as AU-A-2003208427

25 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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