PROJECTION OBJECTIVE FOR A PROJECTION EXPOSURE APPARATUS

Details for Australian Patent Application No. 2003208331 (hide)

Owner CARL ZEISS SMT AG

Inventors SINGER, Wolfgang; MANN, HansJurgen; WANGLER, Johannes; ULRICH, Wilhelm

Pub. Number AU-A-2003208331

PCT Number PCT/EP03/00485

PCT Pub. Number WO2004/010224

Priority 10/201,652 22.07.02 US

Filing date 20 January 2003

Wipo publication date 9 February 2004

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 017/06 Systems with reflecting surfaces, with or without refracting elements

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 10/201,652 22.07.02 US

18 March 2004 Application Open to Public Inspection

  Published as AU-A-2003208331

7 April 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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