USE OF ELECTRONIC SPECKLE INTERFEROMETRY FOR DEFECT DETECTION IN FABRICATED DEVICES

Details for Australian Patent Application No. 2003207846 (hide)

Owner PETERSON, Michael, L., Jr MILLIPORE CORPORATION

Inventors PETERSON, Michael, L., Jr; DILEO, Anthony, J.

Pub. Number AU-A-2003207846

PCT Number PCT/US03/03408

PCT Pub. Number WO2003/067246

Priority 60/354,754 05.02.02 US

Filing date 3 February 2003

Wipo publication date 2 September 2003

International Classifications

G01B 011/16 Measuring arrangements characterised by the use of optical means - for measuring the deformation in a solid, e.g. optical strain gauge

G01N 029/14 Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves - using acoustic emission techniques

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 60/354,754 05.02.02 US

25 September 2003 Application Open to Public Inspection

  Published as AU-A-2003207846

21 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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