A SYSTEM AND METHOD FOR INSPECTING CHARGED PARTICLE RESPONSIVE RESIST

Details for Australian Patent Application No. 2003207700 (hide)

Owner APPLIED MATERIALS ISRAEL, LTD. APPLIED MATERIALS, INC.

Inventors SENDER, Benzion; EYTAN, Guy; DROR, Ophir

Pub. Number AU-A-2003207700

PCT Number PCT/US03/02415

PCT Pub. Number WO2003/067652

Priority 60/354,260 04.02.02 US

Filing date 27 January 2003

Wipo publication date 2 September 2003

International Classifications

G01R 031/305 Arrangements for testing electric properties

G01N 023/22 Investigating or analysing materials by the use of wave or particle radiation not covered by group or , e.g. X-rays, neutrons - by measuring secondary emission

G01B 015/04 Measuring arrangements characterised by the use of wave or particle radiation

H01J 037/28 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - with scanning beams

G01R 031/265 Arrangements for testing electric properties

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 60/354,260 04.02.02 US

25 September 2003 Application Open to Public Inspection

  Published as AU-A-2003207700

21 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003207701-A CO-CATALYST PROTON EXCHANGE MEMBRANE FUEL CELL UTILIZING BOROHYDRIDE FUELS

2003207699-SYSTEM AND METHOD FOR PREVENTING FOULING IN SENSORS