METHOD OF MAKING A THICK MICROSTRUCTURAL OXIDE LAYER AND DEVICE UTILIZING SAME

Details for Australian Patent Application No. 2003207597 (hide)

Owner THE REGENTS OF THE UNIVERSITY OF MICHIGAN

Inventors NAJAFI, Khalil; ZHANG, Chunbo

Pub. Number AU-A-2003207597

PCT Number PCT/US03/01467

PCT Pub. Number WO2003/062137

Priority 60/349,125 16.01.02 US

Filing date 16 January 2003

Wipo publication date 2 September 2003

International Classifications

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B81B 001/00 Devices without movable or flexible elements, e.g. micro-capillary devices

B81B 007/00 Micro-structural systems

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 60/349,125 16.01.02 US

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2003207597

30 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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