APPARATUS AND METHOD FOR IMPROVING THROUGHPUT IN A CLUSTER TOOL FOR SEMICONDUCTOR WAFER PROCESSING

Details for Australian Patent Application No. 2003207497 (hide)

Owner APPLIED MATERIALS, INC.

Inventors WANG, Hougong; YAO, Gongda; XU, Zheng

Pub. Number AU-A-2003207497

PCT Number PCT/US03/00628

PCT Pub. Number WO2003/060964

Priority 10/047,549 15.01.02 US

Filing date 9 January 2003

Wipo publication date 30 July 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 10/047,549 15.01.02 US

4 September 2003 Application Open to Public Inspection

  Published as AU-A-2003207497

30 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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