DEFLECTABLE MICROSTRUCTURE AND METHOD OF MANUFACTURING THE SAME THROUGH BONDING OF WAFERS

Details for Australian Patent Application No. 2003206552 (hide)

Owner SILEX MICROSYSTEMS AB

Inventors SVEDIN, Niklas; WESTIN, Hakan; KALVESTEN, Edvard; EBEFORS, Thorbjorn

Pub. Number AU-A-2003206552

PCT Number PCT/SE03/00252

PCT Pub. Number WO2003/068669

Priority 60/356,165 14.02.02 US

Filing date 14 February 2003

Wipo publication date 4 September 2003

International Classifications

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B81B 007/04 Micro-structural systems

G02F 001/29 Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating - for the control of the position or the direction of light beams, i.e. deflection

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 60/356,165 14.02.02 US

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2003206552

28 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003206553-THREE DIMENSIONAL ALIGNMENT METHOD AND SYSTEM

2003206551-Radiation detector arrangement comprising multiple line detector units