CLUSTER TYPE ASHER EQUIPMENT USED FOR MANUFACTURE OF SEMICONDUCTOR DEVICE

Details for Australian Patent Application No. 2003206246 (hide)

International Classifications

Event Publications

17 July 2003 Complete Application Filed

Priority application(s): 10-2002-0078996 12.12.02 KR

5 August 2004 Application Open to Public Inspection

Published as AU-A-2003206246

1 September 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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