A METHOD OF DEPOSITING A BARRIER LAYER

Details for Australian Patent Application No. 2003205895 (hide)

Owner TRIKON TECHNOLOGIES LIMITED

Inventors BURGESS, Stephen, Robert; DONOHUE, Hilke

Pub. Number AU-A-2003205895

PCT Number PCT/GB03/00696

PCT Pub. Number WO2003/072846

Priority 0204694.4 28.02.02 GB; 60/391,974 28.06.02 US

Filing date 14 February 2003

Wipo publication date 9 September 2003

International Classifications

C23C 014/06 Coating by vacuum evaporation, by sputtering or by ion implantation - characterised by the coating material

C23C 014/16 Coating by vacuum evaporation, by sputtering or by ion implantation - on metallic substrates or on substrates of boron or silicon

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 023/532 Details of semiconductor or other solid state devices

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): 0204694.4 28.02.02 GB; 60/391,974 28.06.02 US

16 October 2003 Application Open to Public Inspection

  Published as AU-A-2003205895

18 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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