A METHOD FOR THE WET TREATMENT OF DISK-LIKE OBJECTS

Details for Australian Patent Application No. 2003205771 (hide)

Owner SEZ AG

Inventors SAX, Harry

Pub. Number AU-A-2003205771

PCT Number PCT/EP03/01568

PCT Pub. Number WO2003/075324

Priority A 348/2002 06.03.02 AT

Filing date 17 February 2003

Wipo publication date 16 September 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 July 2003 Complete Application Filed

  Priority application(s): A 348/2002 06.03.02 AT

23 October 2003 Application Open to Public Inspection

  Published as AU-A-2003205771

25 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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